Dresden 2011 – wissenschaftliches Programm
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KR: Fachgruppe Kristallographie
KR 5: Poster Multiferroics (Joint Session of MA, DF, DS, KR, TT)
KR 5.30: Poster
Dienstag, 15. März 2011, 10:45–13:00, P2
Nanocomposites as a magnetic core in torodial thin film inductors and their integration — Amit Kulkarni1, Thomas von Hofe2, Falk Hettstedt3, Vladimir Zaporojtchenko1, •Thomas Strunskus1, Eckhard Quandt2, Reinhard Knöchel3, and Franz Faupel1 — 1Institute for Material Science, Multicomponent Materials, Faculty of Engineering, University of Kiel, Kaiserstr 2, 24143 Kiel — 2Institute for Material Science, Inorganic Functional Materials, Faculty of Engineering, University of Kiel, Kaiserstr 2, 24143 Kiel — 3Institute of Electrical and Information Engineering, Microwave Group, Faculty of Engineering, University of Kiel, Kaiserstr 2, 24143 Kiel
The current advancements in many areas of modern electronics point towards the development and integration of high frequency magnetic components. Use of high permeable magnetic core in the integrated micro-inductors would lead to miniaturization of the geometry and increased inductance provided that, extra losses due to eddy currents are avoided. We have investigated the high frequency permeability of sputter co-deposited CoFe/SiO2 composite films and their integration into torodial micro inductors. High frequency permeability of the composites depends on the metal filling factor and the anisotropy field present. The later can be induced during the fabrication process. Permeabilities of the order of 100 were achieved at 1 GHz for the core material, and it was shown that the preparation technique is compatible with the inductor integration process. The integration process is presently optimized involving the electromagnetic field simulation tool HFSS.