Dresden 2011 – scientific programme

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MM: Fachverband Metall- und Materialphysik

MM 15: Computational Materials Modelling IV

MM 15.8: Talk

Tuesday, March 15, 2011, 12:45–13:00, IFW B

Investigations of charge and energy distributions in electron beam induced deposition of tungsten — •Harald O. Jeschke, Carlos Ortiz, and Roser Valentí — Institut für Theoretische Physik, Goethe Universität Frankfurt, 60438 Frankfurt am Main, Germany

We employ Monte Carlo simulations of particle trajectories to study the irradiation of a SiO₂ substrate and a W_xC_yO_z deposit with a 5 keV electron beam. We determine the energy distribution of backscattered electrons which is important for the fragmentation of adsorbed W(CO)₆ precursor molecules. We also study the distribution of positive and negative charges in deposit and substrate as function of depth and radial distance from the beam center in a cylindrical geometry. Finally, we determine the profiles of the deposited energy which lead to nonequilibrium electron distributions. We relate our findings to experimental observations.