Dresden 2011 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 38: [DS] Progress in Micro- and Nanopatterning: Techniques and Applications II (Focused Session, jointly with O - Organisers: Graaf, Hartmann)

O 38.5: Vortrag

Mittwoch, 16. März 2011, 12:00–12:15, GER 38

Flexible, free-standing and electrically active TiO₂ nanotubular membranes via lithographic approaches — •Sergiu P. Albu, Steffen Berger, Himendra Jha, and Patrik Schmuki — Department of Materials Science, WW4-LKO, University of Erlangen-Nuremberg, Martensstrasse 7, D-91058 Erlangen, Germany

In the presentation we show the fabrication of a new generation of TiO₂ nanotube membranes. The anodic oxide nanotube growth can be performed through a patterned Ti foil into an underlying Al metal layer [1]. After the selective dissolution of the Al/alumina layer, a very well defined both side open suspended TiO₂ nanotube layer can be obtained. Using lithographic patterning of the anodization area allows to achieve large scale, flexible and well electrically connected nanotubular flow-through membranes with fast electrical switching features over the entire membrane. The removal of the top-initiation layer is based on carrying out anodization through a slowly soluble photoresist coating [2]. These approaches facilitate a better quality and new features of the TiO₂ nanotubular structures.

[1] S. P. Albu, A. Ghicov, S. Berger, H. Jha, P. Schmuki, Electrochem. Commun. 2010, 12, 1352.

[2] S. P. Albu, P. Schmuki, Phys. Status Solidi RRL 2010, 4, 151.