Dresden 2011 – wissenschaftliches Programm
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Q: Fachverband Quantenoptik und Photonik
Q 8: Photonics 1
Q 8.9: Vortrag
Montag, 14. März 2011, 12:30–12:45, SCH A215
SiO2 coated 1D-photonic crystal microcavities in ultra-small SOI waveguides — •Sebastian Kupijai1, Bülent A. Franke1, Aws Al-Saadi1, Miroslaw Szczambura1, Shaimaa Mahdi1, Viachaslau Ksiandzou2, Sigurd Schrader2, Hans J. Eichler1, and Stefan Meister1 — 1Technische Universität Berlin, Institut für Optik und Atomare Physik, Berlin, Germany — 2Technische Fachhochschule Wildau, Institut für Plasma- und Lasertechnik, Wildau, Germany
Microcavity filters in ultra-small Silicon on Insulator (SOI) waveguides are investigated. The microcavities are formed by one-dimensional photonic crystals (1D-PhC) in a Fabry-Pérot structure, which are embedded in planar strip waveguides with 450nm width and 220nm height. The photonic crystal microcavities are fabricated in a CMOS environment using 248nm DUV lithography. An 1um-SiO2-cladding is coated on the waveguide structures by the chemical vapor deposition (CVD) technique. Different types of PhC microcavities on the SOI waveguides, for instance first and higher order cavities and multi-cavities were investigated. The effect of changes of the Fabry-Pérot filter parameter, like hole diameter, hole number and cavity length, on the transmission characteristics at the wavelengths around 1550nm will be presented. Additionally the findings will be compared with uncoated waveguide structures.