Dresden 2011 – scientific programme

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TUT: Tutorials

TUT 4: State of the Art of X-Ray Microanalysis (MI)

TUT 4.2: Tutorium

Sunday, March 13, 2011, 16:45–17:30, HSZ 401

WDS technique - advanced analytical tool for the SEM — •Frank Bauer — Oxford Instruments, Otto von Guericke Ring 10, D-65205, Wiesbaden, Germany

The typical and very common micro analytical equipment on scanning electron microscopes are energy dispersive systems (EDS). An advanced method in analytical investigations for higher accuracy and sensitivity is the wavelength dispersive X-ray spectroscopy (WDS) - in the normal practice the resolution of the detector and sensitivity for elements is in minimum ten times better. Compared to EDS the wavelength dispersive technique needs additional minimum requirements for the scanning electron microscope (SEM) in case of beam current, emission, geometry, etc.

The fundamental physical background of this technique will be shown. Examples of the advantages and also the limitations of WDS are discussed.