Parts | Days | Selection | Search | Updates | Downloads | Help

MI: Fachverband Mikrosonden

MI 6: X-ray imaging, holography and tomography

MI 6.8: Talk

Wednesday, March 28, 2012, 14:15–14:30, TA 201

Three-dimensional X-ray Fourier transform holography — •Jan Geilhufe¹, Carsten Tieg¹, Christian Günther², Erik Gührs², Bastian Pfau², Stefan Schaffert², and Stefan Eisebitt^1,2 — ¹Helmholtz-Zentrum für Materialien und Energie GmbH — ²Institut für Optik und Atomare Physik, Technische Universität Berlin

Three-dimensional topography information is successfully extracted from a single soft X-ray Fourier transform hologram. The feature height is retrieved by propagating the focal plane through the object reconstruction. An artificial test specimen with features sizes down to 20 nm and maximum height differences of 10 µm was prepared by focused ion beam assisted deposition of platinum. In order to acquire a small depth of focus, the hologram was recorded with a large numerical aperture. The small depth of field is exploited to acquire depth information with 500 nm resolution to model a two-dimensional height map with a lateral resolution of 50 nm.