Berlin 2012 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 35: Poster Session II (Polymeric biomolecular films; Nanostructures; Electronic structure; Spin-orbit interaction; Phase transitions; Surface chemical reactions; Heterogeneous catalysis; Particles and clusters; Surface magnetism; Electron and spin dynamics; Surface dynamics; Methods; Electronic structure theory; Functional molecules)

O 35.29: Poster

Dienstag, 27. März 2012, 18:15–21:45, Poster B

Replication of nanometer size structures by laser embossing in thin metal foils — •Martin Ehrhardt, Pierre Lorenz, and Klaus Zimmer — Leibniz Institut für Oberflächenmodifizierung, Permoserstr. 15, 04318 Leipzig

Laser embossing is a micromanufacturing technology which enables the direct fabrication of three dimensional structures in metal foils. In the present study a novel arrangement of pulsed laser microembossing is introduced which allows a more flexible fabrication process with laser microembossing. To demonstrate the capability of the manufacturing process micro and nanostructures were successfully transferred from moulds into silver and copper foils by using UV Excimer laser pulses. The replicated patterns had high accuracy regarding the shape and the spatial resolution. An almost linear correlation between the used laser fluence and the height of the embossed microstructures was observed for both investigated materials. The achieved surface qualities were analysed with scanning electron microscopy (SEM), Atomic Force Microscopy (AFM) and reflection measurements.