Stuttgart 2012 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 13: Poster: Niedertemperaturplasmsen

P 13.17: Poster

Dienstag, 13. März 2012, 16:30–19:00, Poster.III

Symmetry breaking in high power pulsed magnetron sputtering (HPPMS) discharges - a phenomenological model — •Sara Gallian¹, Denis Eremin¹, Daniel Szeremley¹, Thomas Mussenbrock¹, Ralf Peter Brinkmann¹, Ante Hecimovic², Teresa de los Arcos², Volker Schulz-von der Gathen², Marc Böke², Jörg Winter², and William N. G. Hitchon³ — ¹Lehrstuhl für Theoretische Elektrotechnik, Ruhr-Universität Bochum — ²Lehrstuhl für Experimentalphysik II, Ruhr-Universität Bochum — ³Department of Electrical and Computer Engineering, University of Wisconsin-Madison

High power pulsed magnetron sputtering (HPPMS) is a recently developed IPVD (ionized physical vapor deposition) technique. In contrast to DC magnetrons, HPPMS discharges are operated with pulsed power sources, characterized by peak power densities of several kW, pulse durations of a few hundred microseconds, and repetition rates of a ten Hertz. Recently, it was found experimentally that HPPMS discharges exhibit pronounced spatio-temporal behavior, notably an instability which breaks the axial system of the setup. In this contribution we present a phenomenological model of that phenomenon, cast as a system of nonlinearly coupled partial differential equations for the plasma density ne and the neutral gas density nN. Analytical solutions for the model are presented and a comparison with experimental data is given. The authors acknowledge funding by the Deutsche Forschungsgemeinschaft within the frame of SFB-TR 87.