Stuttgart 2012 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 13: Poster: Niedertemperaturplasmsen

P 13.25: Poster

Dienstag, 13. März 2012, 16:30–19:00, Poster.III

Time dependent charge-voltage characteristic for RF modulated sheath — •Mohammed Shihab¹, Abd Elfattah Elgendy¹, Ihor Korolov², Aranka Derzsi², Julian Schulze³, Denis Eremin¹, Zoltan Donko², Thomas Mussenbrock¹, and Ralf Peter Brinkmann¹ — ¹Ruhr-University Bochum, Institute for Theoretical Electrical Engineering, D-44780 Bochum, Germany — ²Research Institute for Solid State Physics and Optics, Hungarian Academy of Sciences, Budapest, Hungary — ³Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany

Low pressure capacitively coupled plasmas are widely used in plasma processing and microelectronics industry. Understanding the dynamics of the boundary sheath is a fundamental problem. In this contribution, we investigate the nonlinear dynamics of modulated RF plasma boundary sheath employing a self-consistent kinetic boundary sheath model termed “Ensemble In Spacetime”, Particle In Cell (PIC) model, and an analytical model. Asymmetric sheath dynamics is observed for the intermediate RF regime, i.e., when the ion transit time is of the order of the RF period. The ion inertia causes an additional phase difference between the expansion and the contraction phase of the plasma sheath leading to a hysteresis relation for the charge-voltage characteristics. The financial support from the Federal Ministry of Education and Research within the frame of the project "Plasma Technology Grid" and the support of the DFG via the SFB TRR87 is gratefully acknowledged.