Stuttgart 2012 – wissenschaftliches Programm
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Q: Fachverband Quantenoptik und Photonik
Q 54: Poster 3
Q 54.30: Poster
Donnerstag, 15. März 2012, 16:30–19:00, Poster.I+II
Laser-induced front side etching using self-regenerating adsorber layer (SAL-LIFE) of fused silica — •Pierre Lorenz, Martin Ehrhardt, and Klaus Zimmer — Leibniz-Institut of Surface Modification, Permoserstr. 15, 04318 Leipzig, Germany
Laser-induced front side etching (LIFE) is a method for laser etching of transparent materials using absorber layers. Within this study the continuous etching of fused silica with self-regenerating adsorber layers is presented using nanosecond KrF excimer laser radiation (λ = 248 nm, Δ tp = 25 ns). The sample was positioned in a vacuum chamber which was loaded by toluene gas and the gas phase induced the self-regenerating adsorber layer on the sample surface. The laser beam was focused onto the sample surface through the gas. The laser fluence, the number of pulses, the repetition rate as well as the partial pressure of toluene was varied. The laser fluence was altered up to 5 J/cm2 and the surface was processed with different pulse numbers up to 1000 pulses at different repetition rates from 1 to 100 Hz. The treated fused silica was analysed with microscopic (white light interferometry, scanning electron microscopy (SEM)) and spectroscopic methods (X-ray photoelectron spectroscopy (XPS), energy dispersive X-ray spectroscopy (EDX)). The results disclose that the SAL-LIFE method allows nm-precision structuring of fused silica with low surface roughness over a large etching depth range from nm to a few hundred µm as well as a large lateral etching region from sub-µm to a few cm.