DPG Phi
Verhandlungen
Verhandlungen
DPG

Regensburg 2013 – scientific programme

Parts | Days | Selection | Search | Updates | Downloads | Help

DS: Fachverband Dünne Schichten

DS 13: Poster Session III: Layer properties: electrical, optical and mechanical properties; Thin film characterization: structure analysis and composition (XRD, TEM; XPS, SIMS, RBS..)

DS 13.2: Poster

Monday, March 11, 2013, 17:00–20:00, Poster B1

Doped TiO2 as alternative transparent conducting oxide — •Daniel Dorow-Gerspach, Philipp Schulte, Patrick Ries, and Matthias Wuttig — I. Physikalisches Institut (IA) RWTH-Aachen University

In many highly demanded modern devices, such as displays and solar cells, materials are needed, that are transparent and at the same time highly conductive. Commonly such materials are called transparent conducing oxides (TCO), with the well-known and efficient but also expensive representative In2O3:Sn. A promising cheaper alternative is Niobium doped Titania (TiO2:Nb), with the matrix material TiO2 that is already used for anti-reflective coatings or self-cleaning surfaces. For the commercial utilization, there are two challenges. One is the relatively high temperature for the annealing of amorphously deposited TiO2. The other challenge is that the most conducting films were achieved by RF-sputtering, which is not suitable for large scale production processes. In this work we have used TiO2 seed layers to reduce the required annealing temperature by 50 K. To address the second point and obtain higher deposition rates, we have employed a reactive DC-sputtering process using a metallic Ti:Nb target. These approaches led to the fabrication of conducting films with a reduced crystallization temperature yet good electronic properties.

100% | Mobile Layout | Deutsche Version | Contact/Imprint/Privacy
DPG-Physik > DPG-Verhandlungen > 2013 > Regensburg