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DS: Fachverband Dünne Schichten
DS 16: Focus Session: Sensoric Micro and Nano-systems II
DS 16.8: Talk
Tuesday, April 1, 2014, 16:00–16:15, CHE 89
Predicting the performance of all-metal AFM tips — •E. Sheremet1, R.D. Rodriguez1, V. Kolchuzhin2, V. Desale1, K. Bhattacharya1, J. Mehner2, S. Schulze3, M. Hietschold3, and D.R.T. Zahn1 — 1Semiconductor Physics, — 2Microsystems and Precision Engineering, — 3Solid Surfaces Analysis Group. Technische Universität Chemnitz, D-09107 Chemnitz, Germany
Atomic force microscopy (AFM) is one of the most common tools for nanoscale characterization. The quality of the information and the spatial resolution that can be achieved in the measurements are largely determined by the AFM tip used. Many applications, such as electrical AFM and tip-enhanced Raman spectroscopy (TERS), require metallic tips, which are normally prepared by covering Si or Si3N4 tips with a thin metal layer. Unfortunately, the coating readily goes away upon contact with the sample [1]. We developed all-metal gold and silver AFM tips [2], which provide much more robust performance. However, unconventional materials and shape of the cantilevers and tips makes it necessary to develop a model of their dynamical properties. We statistically analyzed custom-made gold and silver tips in order to develop a parametrical model which can predict their performance in AFM. The tips are simulated by the finite element method and the validity of the model is confirmed by comparing the simulated and measured tip resonance spectra. The model is then analyzed in order to extract empirical parametric quantities predicting the tip performance.
[1] S.S. Kharintsev, et al. Nanotechnol. 18, 315502 (2007).
[2] R.D. Rodriguez, et al. Rev. Sci. Instrum. 83, 123708 (2012).