Dresden 2014 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 6: Thin Film Characterization: Structure Analysis and Composition (XRD, TEM, XPS, SIMS, RBS,...)

DS 6.6: Vortrag

Montag, 31. März 2014, 16:15–16:30, CHE 89

Optimization of crystal and morphological Parameters wetchemical synthesized LiNbO₃-Films — •Doreen Eger, Diana Karsch, Erik Mehner, Hartmut Stöcker, and Dirk Meyer — TU Freiberg - Institut für experimentelle Physik

Lithium niobate is a versatile applicable material. Some applications require thin films on substrates, which can be produced only with high effort until now. The wet-chemical synthesis is an environment friendly alternative for coating. In this contribution the influence of processing parameters of annealing on substrates made of silicium are investigated.

Samples dip-coated with three different sols or solutions are annealed at different high temperatures. For morphology analysis of the films mainly confocal and scanning electron microscopy are used. The portions of crystalline lithium niobate and other phases are investigated by grazing incidence X-ray diffraction.

The coating based on NbCl₅ shows the best results. The annealing at about 800 ^∘C for 4 h yields the maximum amount of crystalline Lithium niobate with in parallel minimal impurity phases.