Dresden 2014 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 85: Organic light emission

HL 85.5: Vortrag

Donnerstag, 3. April 2014, 10:30–10:45, POT 006

Inorganic nanolaminate-encapsulation for organic light emitting diodes — •Aarti Singh1, Frederik Nehm2, Hannes Klumbies2, Uwe Schröder1, Lars Müller-Meskamp2, Christoph Hoßbach3, Matthias Albert3, Karl Leo2, and Thomas Mikolajick11Namlab GmbH, Nöthnitzerstr 64, 01187 Dresden, Germany — 2Institut für Angewandte Photophysik, TU Dresden, George-Bähr-Straße 1, 01069 Dresden — 3Institut für Mikroelektroniktechnik, Nöthnitzerstr 64, 01187 Dresden

TiO2/Al2O3 and HfO2/Al2O3 multilayer of 20-100 nm total thickness have been tested for their diffusion barrier properties as direct encapsulation on organic light emitting diodes (OLEDs) and as indirect barrier layers on flexible PPET substrates. The different atomic layer deposition (ALD) process precursors, individual layer thickness and the total thickness of the nanolaminate stack were varied to evaluate optimum parameters that yielded best protection for OLEDs and resulted in lowest transmission rates for water. Water vapour transmission rates deduced out of electrical Ca test measurement reflect that the thin single layers (approx. 2 nm) in multilayer film stacks prove to be the best encapsulation layers in TiO2/Al2O3 system. WVTR values of 4x10-5 g/m2/day have been measured at 38C, 90 RH in 20 nm thick ALD single layers deposited at 80C. Luminescence measurements on OLEDs/Glass will be presented. The measurements are in accordance with the results of WVTR measurements and show that nanolaminates with thin single layers in the range of 0.5-1nm protect OLEDs better and longer than nanolaminates with thick single layers.

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