Dresden 2014 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 86: Photonic crystals and cavities

HL 86.3: Vortrag

Donnerstag, 3. April 2014, 10:00–10:15, POT 051

ZnO based two-dimensional photonic crystal resonators. — •Sandro Hoffmann, Marcel Ruth, Thomas Zentgraf, and Cedrik Meier — University of Paderborn, Experimental Physics & CeOPP, Warburger Str. 100, 33098 Paderborn.

With emission in the UV region, ZnO is a promising material system for photonic resonator based devices. In particular, photonic crystals (PhCs) have the potential for realizing high quality resonators and waveguides.

The fabrication of fully undercut ZnO based photonic crystal membranes is presented in this talk. Initially, the ZnO is grown by plasma assisted molecular beam epitaxy (MBE) on a dry oxidized SiO2 layer on top of a Si(111) substrate and is subsequently covered with SiO2 via chemical vapor deposition (CVD). Thereafter, the heterostructure is patterned by electron beam lithography and reactive ion etching, followed by wet etching in a KOH solution. Additionally, high temperature rapid thermal annealing (RTA) is used in order to enhance the photoluminescence (PL) of the ZnO layer. Measurements of a H3 cavity by cw excitation and two-photon absorption result in resonances within the photonic band gap for TE-polarization between 2.9 eV and 3.2 eV. Finite-differences time-domain (FDTD) simulations support the experimental data. Providing emission in the UV region and photonic waveguiding, this is essential for the realization of numerous applications, including quantum information and photonic circuits.

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