Dresden 2014 – wissenschaftliches Programm

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MI: Fachverband Mikrosonden

MI 8: Poster: Microanalysis and Microscopy

MI 8.6: Poster

Mittwoch, 2. April 2014, 17:00–19:30, P4

Prototyping of Cobalt MFM tips with high spatial resolution using electron beam induced deposition — •Johannes J.L. Mulders and Daniela Sudfeld — FEI Electron Optics B. V., Eindhoven, The Netherlands

The fast creation of MFM cantilevers for magnetic force microscopy studies is a challenge for many conventional lithography techniques. Electron beam induced deposition is a direct write patterning technique, using the electron beam of a scanning electron microscope (SEM) to locally dissociate injected precursor molecules adhered to a surface. The details are described elsewhere [1], but in 3 minutes a tip can be made without clean room environment. With FEI EBID technique, MFM tips in the form of Co spike tips with a lateral resolution of 10 nm were produced [2]. In addition, the magnetic spatial resolution for those MFM cantilevers is improved and measurements with those tips indicated a better signal-to-noise performance [2]. The vertical growth is controlled by the dwell time and very accurate on the nano-scale regime due to the 3 dimensional, mask-free patterning. That allows to tailor the shape of the tip to enhance the performance. The life time and stability of tips can be increased by additional carbon coating preventing natural oxidation. [1] Utke I, Moshkalev S, Russell P: Nanofabrication Using Focused Ion and Electron Beams, Chapter 10, Oxford University Press (2012; [2] L. M. Belova et al., Rev. Sci. Instrum. 83, 093711 (2012)