Dresden 2014 – wissenschaftliches Programm

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MI: Fachverband Mikrosonden

MI 8: Poster: Microanalysis and Microscopy

MI 8.8: Poster

Mittwoch, 2. April 2014, 17:00–19:30, P4

Diffractive Optics Research at Max Planck Institute for Intelligent Systems in Stuttgart — •Kahraman Keskinbora, Umut Tunca Sanli, Marcel Mayer, Corinne Grévent, and Gisela Schütz — Max Planck Institute for Intelligent Systems, 70569, Stuttgart, Germany

We develop new nano-fabrication methods for advanced focusing optics called Fresnel zone plates (FZP). One of these methods, implies a combination of the atomic layer deposition (ALD) and the focused ion beam (FIB), and allows to fabricate FZPs having outermost zone widths as small as 10 nm with extremely high aspect ratios compared to the FZPs fabricated by e-beam lithography (EBL). Moreover, we have demonstrated that these zone plates can actually work efficiently over a wide energy range from soft to hard X-rays. Our current research covers the improvement and optimization of the material selection of the ALD deposition process and FIB slicing/polishing. In another fabrication method, we utilize the direct writing capabilities of the FIBs for ultra-rapid fabrication of FZPs with features as small as 30 nm. It was possible to resolve features down to 21 nm. The fabrication lasts less than 9 minutes and the resolution is close to those of standard EBL-FZPs, which is remarkable. We are working towards improving resolutions and diffraction efficiencies of IBL-FZPs by pattern design and process optimizations as well as material improvements