Dresden 2014 – wissenschaftliches Programm
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MM: Fachverband Metall- und Materialphysik
MM 65: Topical session: X-ray and neutron scattering in materials science VI - Which orientations can we expect for elongated particles in self-confined systems?
MM 65.4: Vortrag
Freitag, 4. April 2014, 12:45–13:00, BAR 205
Ultrananocrystalline diamond films studied using GISAXS/ GISANS — •Hadwig Sternschulte1, Isabella Staudinger1, Sebastian Simeth1, Alessandro Sepe1, Christine M. Papadakis1, Jan Perlich2, Stephan V. Roth2, Jean-Francois Moulin3, Slimane Ghodbane4, and Doris Steinmüller-Nethl4 — 1TU München, Physik Department, Garching — 2DESY, Hamburg — 3Helmholtz-Zentrum Geesthacht, Garching — 4DiaCoating GmbH, Innsbruck, Austria
Ultrananocrystalline diamond (UNCD) films are characterised by their small grain size of less than 10nm and a smooth surface with RMS values down to 10nm independent of the film thickness. The diamond grains in round shapes embedded in an amorphous C:H matrix are randomly oriented. Usually, UNCD films are studied by transmission electron microscopy (TEM) to obtain information about the grain size and the distance of the grains in the matrix. One disadvantage of TEM on diamond is that a highly sophisticated preparation is needed. For the first time we analysed UNCD films with grazing-incidence small-angle X-ray [1] and neutron scattering (GISAXS/GISANS). For this study UNCD films were grown on Si substrates by a modified hot filament technique using a CH4/H2 gas mixture. Prior to the deposition, the substrates have been pre-treated by an ultrasonic bath with diluted diamond powder. By data modelling and simulation we analyzed in detail the GISAXS/GISANS maps. The results will be discussed in comparison with TEM images with respect to growth processes. [1] H. Sternschulte et al, Diamond Relat. Mater. 37 (2013) 68