Dresden 2014 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 11: Nanostructures at Surfaces I

O 11.4: Vortrag

Montag, 31. März 2014, 11:15–11:30, WIL C107

Large scale ordered binary nanopatterns via pre-patterned anodic aluminum oxide — •Liaoyong Wen, Yan Mi, Chengliang Wang, Fabian Grote, Huaping Zhao, Min Zhou, and Yong Lei — Ilmenau University of Technology, Institute of Physics & IMN MacroNano* (ZIK) Prof. Schmidt-Str. 26, 98693 Ilmenau Ilmenau, Ilmenau, Germany

Multicomponent nanopatterns, such as binary superlattices, consist of two or more kinds of materials or morphologically dissimilar nanocomponents. Unlike single component counterparts, multicomponent nanopatterns offer enormous diversities in the pattern shape, material composition and corresponding functionality. Nevertheless, there are very few simply lithographic techniques capable of constructing such nanopatterns in one single domain area. Nanoporous anodic aluminum oxide (AAO) has been intensively exploited as a template technique for the preparation of many kinds of nanostructures. However, the existing AAO only consist of single-sharp, monodisperse nanopores. Herein, we develop a novel selective etching approach to address this limitation and successfully generate ordered binary nanopores. The size of the binary nanopores is independently tunable without influencing the pattern periodicity and the well-established etching methods are scalable to arbitrary large area processing. More importantly, combing with other growth or deposition techniques, the ordered binary pores can act as a template to realizing different kind of ordered binary nanopatterns, such as binary nanowires, tubes or dots array.