Dresden 2014 – wissenschaftliches Programm
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O: Fachverband Oberflächenphysik
O 63: Posters: Scanning Probe Methods
O 63.22: Poster
Mittwoch, 2. April 2014, 17:30–21:00, P2
z-resolution of 5 nm in a scanning electron microscope using a nanofinger — •Martin Grob1, Eva Maynicke2, Ivo Burkart2, Marcus Liebmann1, Volker Klocke2, and Markus Morgenstern1 — 1II. Inst. Phys. B, RWTH Aachen University, 52074 Aachen — 2Klocke Nanotechnik, 52076 Aachen
Scanning electron microscopy (SEM) is a common technique for investigating surfaces on the nanometer scale. One main disadvantage is the low vertical resolution compared to the lateral resolution which can only be achieved by proper focussing. To overcome this limitation we implemented a small scanhead which operates the same way as an atomic force microscope (AFM) in the dynamic mode. With this additional sensor in the SEM we can reach a vertical resolution better than 5 nm. With this tool, a direct in-situ control mechanism is given, e.g. structures grown by electron beam induced deposition (EBID) can be characterized under vacuum conditions. In addition, this scanner can provide coordinates on a surface for the navigation of other tools such as contacting tips.