Dresden 2014 – wissenschaftliches Programm
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O: Fachverband Oberflächenphysik
O 63: Posters: Scanning Probe Methods
O 63.33: Poster
Mittwoch, 2. April 2014, 17:30–21:00, P2
3D nanofabrication of subsurface structures inside photosensitive glass with fs laser — •Tobias Milde1, Ulrike Brokmann2, Edda Rädlein2, and Klaus Liefeith1 — 1Department of Biomaterials, Institute for Bioprocessing and Analytical Measurement Techniques Heiligenstadt — 2Group of Inorganic-Nonmetallic Materials, Department of Mechanical Engineering, Technische Universität Ilmenau
The development of miniaturized structures on or below the surface of glass is an issue of present research. Femtosecond-laser-radiation combined with the two photon process is a promising approach to push the written structures towards the nanometer scale. Here we used the photosensitive glass FS21 with its three step photoform process (irradiation, annealing, HF-etching). For the irradiation we used a TiSa oscillator only. These structures and steps are developed to realize a distinct miniaturization of glass components and to improve biocompatibility for specific cells. These structured glass are interesting for microfluidic and lab-on-a-chip devices.