Dresden 2014 – wissenschaftliches Programm

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VA: Fachverband Vakuumphysik und Vakuumtechnik

VA 1: Vacuum Generation

VA 1.1: Hauptvortrag

Montag, 31. März 2014, 10:00–10:40, HSZ 105

Development of a novel mechanical bearing turbomolecular pump for research and analytical applications — •Ernst Schnacke — Oerlikon Leybold Vacuum GmbH

The requirements for turbomolecular pumps in research and analytics tend towards higher efficiency for light gasses, high reliability, and user friendly integration in systems and their controls. The presentation shows a discussion of existing bearing concepts and an evaluation of advantages/disadvantages. The chosen bearing concept then was optimized for longest lubrication lifetime. A computing methods were developed to optimize rotor/stator geometry for varying requirements for high pumping speed, compression, and gas dependency. The result is a gain of at least 30% efficiency for same diameter. Fully integrated electronics gave further opportunity to reduce power consumption and cooling requirement.