Berlin 2015 – wissenschaftliches Programm
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HL: Fachverband Halbleiterphysik
HL 35: Semiconductor laser
HL 35.5: Vortrag
Dienstag, 17. März 2015, 12:15–12:30, EW 203
Metal grating based Interband Cascade Lasers from 3-6 microns — •Julian Scheuermann1, Michael von Edlinger1, Robert Weih2, Lars Nähle1, Marc Fischer1, Johannes Koeth1, Sven Höfling2, and Martin Kamp2 — 1nanoplus GmbH, Oberer Kirschberg 4, 97218 Gerbrunn, Germany — 2Technische Physik Universität Würzburg, Am Hubland, 97074 Würzburg, Germany
The wavelength region from 3 to 6 microns is of great interest for gas sensing, since many gases have their strongest absorption features in this range. A common approach for highly accurate detection is the so called tunable laser spectroscopy, using distributed feedback (DFB) lasers. Monomode DFB type interband cascade lasers (ICLs) can address the spectral range of interest with superior performance and show low threshold currents as well as low power consumption, which is essential for the application in modern gas sensing systems.
We will report on the fabrication and characterization of novel ICL DFB lasers with lateral metal grating structure. The performance characteristics of fabricated devices are discussed. The definition of the ridge waveguide structure by dry etching and the metal grating structure by electron beam lithography are particular critical processing steps having a high influence on mono mode performance and tuning behavior. Single mode continuous wave emission at room temperature was obtained for various laser structures emitting in the 3-6 μm region with current tuning range up to 22 nm and (noise limited) side mode suppression ratios in excess of 30 dB. Threshold currents below 10 mA and output powers above 20 mW have been observed.