Berlin 2015 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 73: Graphene: Structure (O with HL/TT)

HL 73.5: Vortrag

Donnerstag, 19. März 2015, 11:30–11:45, MA 041

Freestanding lateral nanostructures of two-dimensional carbon materials — •Andreas Winter¹, Yasin Ekinci², Rainer Stosch³, Thomas Weimann³, Johannes Biskupek⁴, Ute Kaiser⁴, and Andrey Turchanin¹ — ¹Faculty of Physics, Bielefeld University, 33615 Bielefeld, Germany — ²Laboratory for Micro- and Nanotechnology, Paul Scherrer Institut, 5232 Villigen, Switzerland — ³Physikalisch-Technische Bundesanstalt, 38116 Braunschweig, Germany — ⁴Electron Microscopy Group of Materials Science, Ulm University, 89081 Ulm, Germany

Two-dimensional (2D) carbon materials like graphene, hexagonal boron nitride or carbon nanomembranes (CNMs) have recently attracted enormous interest due to their potential use in electronics, chemical and biological sensors, nanofilters, hybrid materials etc. Most applications require a lithographic patterning of these 2D materials. Here we present various micro- and nanostructures of graphene and CNMs as well as their in-plane heterostructures fabricated via optical, e-beam and EUV interference lithography. The preparation of these structures on supporting substrates as well as large area freestanding nanomembranes with patterns varying from ca. 100 μm to 50 nm will be shown. Via electron irradiation, graphene and dielectric CNMs can be stitched together, forming electrically heterogeneous ultrathin 2D carbon sheets. We characterize their properties employing X-ray photoelectron and Raman spectroscopy, helium ion microscopy and high-resolution TEM.