Berlin 2015 – wissenschaftliches Programm
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MI: Fachverband Mikrosonden
MI 6: Scanning Probe Microscopy
MI 6.2: Vortrag
Dienstag, 17. März 2015, 11:45–12:00, EMH 225
Multifrequency AFM with Self-sensing Tunneling Magnetoresistive (TMR) Cantilevers — •Gerald Göring1, Tobias Meier2, Alexander Förste3, Ali Tavassolizadeh4, Karsten Rott5, Dirk Meyners4, Roland Gröger3, Günter Reiss5, Eckhard Quandt4, Thomas Schimmel1,3, and Hendrik Hölscher2 — 1Institute of Applied Physics, Karlsruhe Institute of Technology (KIT) — 2Institute of Microstructure Technology, Karlsruhe Institute of Technology (KIT) — 3Institute of Nanotechnology, Karlsruhe Institute of Technology (KIT) — 4Institute for Materials Science, Christian-Albrechts-Universität zu Kiel — 5CSMD, Physics Department, Bielefeld University
We describe self-sensing tunneling magnetoresistive (TMR) cantilevers which can be utilized for multi-frequency AFM. Furthermore, we achieve a large scan-range with a nested scanner design of two independent piezo scanners: a small high resolution scanner with a scan range of 5x5x5 µm3 is mounted on a large area scanner with a scan range of 800x800x35 µm3. In order to characterize TMR sensors on AFM cantilevers as deflection sensors, the AFM is equipped with a laser beam deflection setup to measure the cantilevers deflection independently. Images obtained on different samples such as calibration standard, optical grating, EPROM chip, self-assembled monolayers and atomic step-edges of gold demonstrate the high stability of the nested scanner design and the performance of self-sensing TMR cantilevers.