Bochum 2015 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 4: Plasma Technology I

P 4.6: Vortrag

Montag, 2. März 2015, 15:40–15:55, HZO 30

Plasmoids for etching and deposition — •Ramasamy Pothiraja, Jan-Wilm Lackmann, Patrick Hermanns, Max Engelhardt, Nikita Bibinov, and Peter Awakowicz — Institute for Electrical Engineering and Plasma Technology, Ruhr- University Bochum, Bochum, Germany.

Plasmoids (self-sustained plasma entities) are produced by propagation of ionization waves in a filamentary discharge in argon as well as in the tail of plasma bullets in helium. Plasmoids are separated from plasma-bullet by trapping of ionization waves (plasma bullets) in the rare gas flow, and hence properties of plasmoids are studied. Plasmoids collect material by propagation through precursor containing gas mixture as well as by etching of solid films. They transport the material, compress it, and produce crystals. If carbon material is collected by the plasmoids then diamonds are produced. Plasmoids propagate through small holes and slits as well as through glass materials. Their etching properties are used for the decontamination of micro-organisms. Ref: R. Pothiraja, N. Bibinov and P. Awakowicz, 2014 J. Phys. D: Appl. Phys. 47 315203 R. Pothiraja, N. Bibinov and P. Awakowicz, 2014 J. Phys. D: Appl. Phys. 47 455203