Bochum 2015 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 5: Poster Session - Low Temperature Plasmas

P 5.12: Poster

Montag, 2. März 2015, 16:30–18:30, Foyer Audimax

Effect of an axial magnetic field on the symmetry of a capacitively coupled plasma — •Felix David Klute, Dirk Luggenhölscher, and Uwe Czarnetzki — Institute for Plasma and Atomic Physics, Ruhr-University, 44780 Bochum

An axial magnetic field is used to vary the symmetry and the corresponding DC selfbias of a capacitively coupled Radio-Frequency (CCRF) argon discharge, inside a GEC reference cell. The magnetic field confines the charged species of the plasma inside the gap volume. This decreases the effective size of the grounded electrode, therefore increasing the geometric symmetry of the discharge. To observe the influence of the magnetic field on the discharge, the DC selfbias is measured. Cases with and without a magnetic field are compared. Additionally, the spatial emissionprofile of the discharge using an Abel inversion method is measured. The effects of power and gas pressure variations are studied. The selfbias measurements as well as the optical characteristics show that application of a magnetic field can lead to a nearly symmetric discharge. For increasing plasma powers however, the magnetic confinement seems to be insufficient, most likely due to an increased drift of charged species outside of the gap volume, caused by Simon diffusion.