Hannover 2016 – wissenschaftliches Programm
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MS: Fachverband Massenspektrometrie
MS 4: Resonance Ionization MS and others
MS 4.7: Vortrag
Dienstag, 1. März 2016, 16:15–16:30, f128
ToF-SIMS and Laser-SNMS Investigations of Different Polymer Systems — •Andreas Pelster1, Martin Körsgen1, Rainer Kassenböhmer1, Hiromi Morita2, and Heinrich F. Arlinghaus1 — 1University of Münster, Physikalisches Institut, Wilhelm-Klemm-Str. 10, 48149 Münster, Germany — 2Panasonic Corporation, Device Research Laboratory, Advanced Research Division, 3-1-1 Yagumo-naka-machi, Moriguchi City, Osaka 570-8501, Japan
Polymer systems become more and more important for the technical or medical industries. For characterizing and improving of thin organic film systems, it is very important to determine the 3D chemical composition of such systems. For this, two powerful methods are time-of-flight secondary ion mass spectrometry (ToF-SIMS) and laser post-ionization secondary neutral mass spectrometry (Laser-SNMS). Both techniques are based on the detection of sputtered particles from the surface produced by ion bombardment. In the case of ToF-SIMS the sputtered secondary ions can be directly detected while in the case of Laser-SNMS the sputtered neutrals have to be post-ionized with a pulsed laser beam prior detection. In this study we investigated the yields of different polymer systems and films using both ToF-SIMS and Laser-SNMS. It was found that with 157 nm laser post-ionization the molecular yield for several polymer signals could be enhanced by more than one order of magnitude compared to the corresponding molecular yields obtained with ToF-SIMS. High-resolution sub-micrometer images showed that for some polymer samples only Laser-SNMS could distinguish between specific polymers in a structured mixture.