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P: Fachverband Plasmaphysik

P 24: Low Temperature Plasmas II

P 24.3: Talk

Thursday, March 3, 2016, 15:25–15:40, b305

Plasma series resonance as a surface wave phenomenon — •Denis Eremin, Thomas Mussenbrock, and Ralf-Peter Brinkmann — Ruhr-Universität Bochum, Universitätsstrasse 150, D44801, Bochum

The plasma series resonance (PSR) is an important phenomenon in low-pressure capacitively coupled plasmas. Such bounded plasmas have a natural eigenfrequency determined by the energy oscillation between the electrostatic field in the plasma sheath and the kinetic energy of the bulk plasma electrons and can be resonantly pumped, should the rf current exhibit a finite-amplitude harmonic at that frequency. In the low-pressure plasmas the PSR significantly contributes to the plasma heating by generating highly energetic electron beams. Traditionally, the PSR has been treated in the literature as a 1d phenomenon. However, it appears to be a part of a more general phenomenon of a surface wave propagating in the discharge. This talk will discuss the connection between the PSR and the surface wave using both theoretical analysis and numerical results.