Hannover 2016 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 25: Poster Session- Theory and Modelling
P 25.11: Poster
Donnerstag, 3. März 2016, 16:30–19:00, Empore Lichthof
Accuracy of fluid and PIC simulations for low pressure ccrf discharges* — •Markus M. Becker1, Hanno Kählert2, Anbang Sun1, Detlef Loffhagen1, and Michael Bonitz2 — 1INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald — 2ITAP, Christian-Albrechts-Universität zu Kiel, Leibnizstr. 15, 24098 Kiel
Particle-in-Cell (PIC) methods are particularly suited for the theoretical description of low pressure rf discharges [1]. Fluid models are required to reduce the computational cost if plasmas at elevated pressures and/or extended reaction kinetics are to be described. In hybrid models, kinetic and hydrodynamic methods are combined in order to take advantage of the benefits from both approaches. As a preliminary study to the development of novel hybrid models, recently developed PIC and fluid tools are presented and benchmarked against reference results for low pressure rf discharges in helium [1]. In particular, the results obtained from enhanced fluid models [2] are compared with those provided by conventional fluid descriptions and by different PIC simulation codes. It is shown that the accuracy of fluid models can be conserved at low pressures if the electron energy transport and the inertia of ions are adequately described.
This work is partly supported by the DFG via SFB-TRR24 and by the PlasmaShape project from the European Union under grant agreement no 316216.
[1] M. M. Turner et al., Phys. Plasmas 20 (2013) 013507
[2] M. M. Becker, D. Loffhagen, Adv. Pure Math. 3 (2013) 343–352
*Part of the Kiel research initiative ‘The Plasma Interface’.