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Q: Fachverband Quantenoptik und Photonik

Q 39: Nano-Optics II

Q 39.4: Talk

Wednesday, March 2, 2016, 15:15–15:30, f342

Tabletop extreme ultraviolet coherence tomography — •Johann Jakob Abel¹, Silvio Fuchs^1,2, Martin Wünsche¹, Julius Biedermann¹, Stefan Aull¹, Jan Bernert¹, Christian Rödel^1,2, Max Möller¹, and Gerhard G. Paulus^1,2 — ¹Institute of Optics and Quantum Electronics, Friedrich-Schiller University of Jena, Max-Wien-Platz 1, Jena — ²Helmholtz Institute Jena, Helmholtzweg 4, Jena

We present a tabletop setup of a 3D nanometer imaging technique called XUV coherence tomography (XCT). Our XCT setup uses broadband extreme ultraviolet radiation from high harmonic generation (HHG).

Optical coherence tomography (OCT) reaches axial resolution on the order of the coherence length l_c∝λ₀²/Δ λ_FWHM which only depends on spectral properties of the light source [1,2]. By using short wavelenghts XCT extends OCT by improving the axial resolution from micrometers to nanometers. In contrast to optical coherence tomography the depth resolution of XCT is mainly limited by transmission windows of the investigated sample [3]. XCT was sucessfully demonstrated at synchrotron sources in the silicon (30-99 eV) and the water transmisson window (280-530 eV), before.

Here we show results using a tabletop XCT setup. We investigated different silicon based samples and achieved depth resolution of 27 nm.

[1] D. Huang et al., Science 254, 1178-1181 (1991). [2] W. Drexler and J. G. Fujimoto , Optical Coherence Tomography (Springer Verlag, Berlin, 2008). [3] S. Fuchs et al., Appl. Phys. B 106, 789-795 (2012).