Regensburg 2016 – wissenschaftliches Programm

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DF: Fachverband Dielektrische Festkörper

DF 13: Nano- and microstructured dielectrics/thin films (DF with KR)

DF 13.2: Vortrag

Donnerstag, 10. März 2016, 09:50–10:10, H26

Nanostructuring of dielectric surfaces using nanosecond laser radiation assisted by metallic absorber layer — •Pierre Lorenz¹, Michael Klöppel^1,2, Christoph Grüner¹, Frank Frost¹, Joachim Zajadacz¹, Martin Ehrhardt¹, and Klaus Zimmer¹ — ¹Leibniz-Institut für Oberflächenmodifizierung e. V., Permoserstraße 15, 04318 Leipzig, Germany — ²Institute of Scientific Computing, Department of Mathematics, TU Dresden, 01062 Dresden, Germany

The laser-induce structuring of different dielectrics assisted by self-organisation of a molten thin metal layer during laser heating with a 248 nm, 25 ns KrF excimer laser was studied. The nanopattern formation at low laser fluence is caused by instabilities of thin molten metal layer on dielectric surfaces within the laser pulse driven by the surface tension of the liquid metal layer. As dielectric substrate and metallic absorber film SiO₂, Al₂O₃, and diamond as well as Cr and Mo were used, respectively. Homogenous and pre-structured metal film were irradiated and specific features of the self-organization process found. For instance, the high laser fluence irradiation of the pre-structured films can result in forming different structures. The resultant structures o the film or in the substrate were investigated by atomic force (AFM) and scanning electron microscopy (SEM). These laser-induced nanoholes were imaged by SEM after cross sectioning by focussed ion beam (FIB). The hole-forming process was simulated using a heat equation to describe the laser-heating of the solid and a kind of Navier-Stokes equation to describe the mass transport in the liquid.