Regensburg 2016 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 53: Poster II

HL 53.34: Poster

Mittwoch, 9. März 2016, 09:30–13:30, Poster A

Towards bright electrically driven single-photon sources in the red spectral range using In-Situ Lithography — •Marc Sartison, Simone Luca Portalupi, Michael Jetter, and Peter Michler — Institut für Halbleiteroptik und Funktionelle Grenzflächen and Research Centers SCoPE and IQST, Universität Stuttgart, Allmandring 3, 70569 Stuttgart, Germany

Semiconductor quantum dots (QDs) have high potential as single-photon light sources in quantum information technologies. Usually, high quality QDs are deposited in Stranski-Krastanov growth mode resulting in a random distribution in position on the sample and in size. Moreover, also the emission energies and the linewidth of single QDs vary due to this deposition scheme. For the fabrication of an efficient bright single-photon source, it is necessary to place the QD at the proper position inside a micro-cavity device. We present a method to find a suitable QD and process the fitted device around the selected QD with an optical lithography method. For this, a sample with resist is placed into the cryostat for optical inspection at 4K. After optical identification of the right QD, the resist is exposed by a green laser to form the mask for the device. Then, the usual semiconductor processing steps including further in-situ lithography form the target electrical resonant cavity LED.