Regensburg 2016 – wissenschaftliches Programm
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HL: Fachverband Halbleiterphysik
HL 92: Postersession DS/HL
HL 92.34: Poster
Donnerstag, 10. März 2016, 16:00–19:00, Poster A
Colloidal masking and ion-etched nanochannels on flexible thin foils — •Calvin Brett1,2, Matthias Schwartzkopf1, Stephan Roth1, Michael A. Rübhausen2, Patrick Kluth3, Markus Bender4, Daniel Severin4, and Christina Trautmann4 — 1DESY, Notkestr. 85, 22607 Hamburg — 2Universität Hamburg, Inst. f. Nanostruktur- und Festkörperforschung, CFEL, APOG, Univ. Hamburg, Luruper Chaussee 149, 22761 Hamburg — 3Australian National University. Department of Electronic Materials Engineering, Research School of Physics and Engineering, The Australian National University, Canberra, ACT 2601 — 4: GSI Helmholtzzentrum für Schwerionenforschung GmbH, Planckstraße 1, 64291 Darmstadt
The major issues in the fabrication of periodic nanostructure arrays are the high costs, low patterning speed, and small patterning area. Spray coating of polystyrene colloids (PS) and ion-etched nanochannels on a flexible, chemical resistance polymer (PDMS) thin foil, enable reusable soft masks for deposition and imprinting techniques. Spray coating leads to a self-assembled colloidal film, where every nanosphere can be used as lenses for lithographic fabrication methods. We prove the application principle and the morphology by scattering methods, contact angle analysis and spectroscopic imaging methods. This study offers a novel routine for cost effective nanofabrication which is wide applicable in nanoscale materials.