Regensburg 2016 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 70: Nanostructures at Surfaces: Other Aspects

O 70.1: Poster

Mittwoch, 9. März 2016, 18:15–20:30, Poster A

Characterization of lamellar nanostructures with X-ray scattering — •Analia Fernandez Herrero, Victor Soltwisch, Mika Pflüger, Anton Haase, Michael Krumrey, and Frank Scholze — Physikalisch-Technische Bundesanstalt

The interest in the reconstruction of nanostructured surfaces has increased in the last decade. Characterizing structures of a few nm challenges the existing metrology tools. The PTB develops high accuracy scattering and reflectometry methods in a broad energy range, from EUV to hard X-rays, at several beamlines at BESSY II and the MLS. Angle resolved scatterometry is a fast and non-destructive method which enables the study of the scattered light from periodic structures. EUV scattering and grazing incidence angle X-ray scattering (GISAXS) are used to investigate structural parameters as the sidewall angle, line width and height of state-of-the-art electron beam written SiN gratings. EUV scatterometry is very sensitive to the imperfections on the structures and therefore it provides a high sensitivity to details of the line geometry. A Maxwell solver based on the finite element method gives consistent results for the reconstruction of arbitrary shape profiles.