Bremen 2017 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 10: Theory and Modeling I

P 10.6: Vortrag

Dienstag, 14. März 2017, 15:30–15:45, HS 2010

Theoretical investigation of power balance of a miniature microwave ICP-plasmajet — •Michael Klute1, Horia-Eugen Porteanu2, Wolfgang Heinrich2, Peter Awakowicz3, and Ralf Peter Brinkmann11Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany — 2Microwave Department, Ferdinand-Braun-Institut Berlin, Germany — 3Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany

Microwave-driven plasmas-jets offer attractive properties for various technical applications. They are usually operated in a capacitive mode. However experimental experience show a number of disadvantages for capacitive energy-coupling. Therefore in large scale plasmas inductive energy-coupling is preferable. Recently Porteanu et al.[1] proposed a small scale plasma-jet operated as an inductive discharge. The key characteristic of the suggested plasma-jet is the implementation of an LC-resonance-circuit into a cavity resonator. In this work the proposed plasma-jet is examined theoretically. A global model for the electromagnetic fields and energy balance is presented. Consequent mathematical analysis of the electromagnetic fields leads to a description based on a sum of different modes. It is found that the modes of zero and first order can be identified with inductive and capacitive coupling. In a second step the matching network and its frequency depended characteristic are taken into account. Finally an investigation of stable working points and possible hysteresis effects is done. [1]H. E. Porteanu et al. Plasma Sources Sci.Technol.22, 035016(2013)

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