Bremen 2017 – wissenschaftliches Programm
P 16.5: Vortrag
Mittwoch, 15. März 2017, 09:55–10:10, HS 1010
Broadening and shift of optical emission lines in a high power impulse magnetron sputtering discharge — •Julian Held, Ante Hecimovic, and Volker Schulz-von der Gathen — Ruhr-Universität Bochum, Germany
Mass spectrometers and Langmuir probes are often used to measure the energy distribution functions and densities of charged species in high power impulse magnetron sputtering (HiPIMS) discharges. However, it is not possible to use these tools in the region close to the target, where the magnetic field lines are closed, without critically disturbing the plasma. In this work, time resolved optical emission spectroscopy was employed to gain greater insight into the region close to the target, where the most important plasma processes take place. A high resolution plane grating spectrograph combined with a fast, gated, intensified CCD camera was used to analyze the discharge. Chromium or Titanium was used as the target material and the discharge was operated in pure Argon. Broadening and shift of optical emission lines was studied to gain information about the velocity distribution of sputtered species.
Supported by Deutsche Forschungsgemeinschaft (DFG) within the framework of the SFB-TR 87.