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Bremen 2017 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 18: Theory and Modeling II

P 18.2: Vortrag

Mittwoch, 15. März 2017, 15:00–15:15, HS 2010

An iterative model to study the coupling between the plasma and a floating surface — •Jan Kaiser, Sebastian Wilczek, and Ralf Peter Brinkmann — Ruhr-Univesität Bochum, Lehrstuhl für Theoretische Elektrotechnik, 44780 Bochum

Measuring plasma parameters (e.g. plasma density, electron temperature) has practical importance to control the plasma process. Common tools to determine these parameters are probes, such as the multipole resonance probe (MRP) or different types of Langmuir probes (LP). All kinds of active probes represent a floating surface which leads to the generation of a plasma sheath and, therefore, to a disturbance of the plasma dynamics in the region around the probe. In this work an iterative model to determine the coupling between the MRP and the plasma is presented. The MRP is modeled as a curved boundary with a fixed potential. The electron and ion physics are treated in two coupled models which are iterated until convergence is achieved. Results for the potential, the electron and ion densities in the region of the MRP are presented.

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