Bremen 2017 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 4: Plasma Technology
P 4.3: Vortrag
Montag, 13. März 2017, 14:45–15:00, HS 2010
CO2-based test for the detection of defects in oxygen barrier layers — •Mariagrazia Troia1, Andreas Schulz1, Matthias Walker1, and Thomas Hirth2 — 1Institute of Interfacial Process Engineering and Plasma Technology IGVP, University of Stuttgart, Stuttgart, Germany — 2Karlsruher Institut für Technologie KIT, Karlsruhe, Germany
Barrier layers performances are severely limited by the presence of punctual micro- and sub-micro-metrical defects. In order to determine the density of defects in barrier layers obtained through PEVCD, their origin and overall effect on oxygen transmission rate, a new non-destructive test has been developed and optimized.
Silica-like films acting as oxygen barrier layers have been deposited by means of an Electron Cyclotron Resonance low-pressure, MW-sustained plasma through gaseous feeds with different HMDSN/O2 ratios.
The coated sample is interposed between a pure CO2 atmosphere and a limewater solution: CO2 permeates preferentially through the pinholes in the barrier layers, causing the precipitation of CaCO3 crystals on top of them. Real-time analysis is performed by means of an optical microscope on top of the testing cell.
Average defect densities for different substrates and for various thicknesses and chemical compositions of barrier layers have been calculated and compared to their respective oxygen transmission rate and barrier improvement factor: the reduction of defects number shows very good accordance with the reduction in the oxygen transmission rates.