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P: Fachverband Plasmaphysik
P 5: Plasma Diagnostics
P 5.10: Poster
Montag, 13. März 2017, 16:30–18:30, HS Foyer
Investigation of Microarray Plasmas with an adjacent dielecric — •Sebastian Dzikowski1, Ronan Michaud2, Remi Dussart2, and Volker Schulz-von der Gathen1 — 1Lehrstuhl für Experimentalphysik II, Ruhr-Universität Bochum, Germany — 2GREMI, University of Orleans, France
Microplasma pixel devices are interesting for applications such as surface modification. A representative is the metal grid array, which is a stable alternative to silicon-based arrays. They consist of a dielectric, a grounded and a powered electrode with symmetrically arranged cavities. Typically, microplasma arrays are operated close to atmospheric pressure with noble gases like argon and helium. By applying a bipolar triangular voltage waveform with an amplitude of 700 V peak-to-peak and a frequency of 10 kHz, the discharge is ignited in the cavities having a diameter of about 200 and depth of 50 µm. For future applications, such as coating and catalysis, the interaction between the array and a dielectric surface positioned at close distance (< 100 µm) is of great importance. Here, we present the phase dependent expansion of the emission out of the cavities by application of phase resolved optical emission spectroscopy. Optical emission spectroscopy allowed the analysis of argon and nitrogen line ratios for both array configurations.
Supported by the DAAD in the frame of projekt 57134635 "CoSi2Me"