Bremen 2017 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 8: Plasma Diagnostics II

P 8.4: Vortrag

Dienstag, 14. März 2017, 09:35–09:50, HS 1010

Correlation of spatially resolved in-vacuum XPS characterisation and optical diagnostics for composite magnetron targets in HiPIMS plasma — •Vincent Layes1, Sascha Monjé1, Carles Corbella1, Volker Schulz-von der Gathen1, Achim von Keudell1, and Teresa de los Arcos21Experimental Physics II Ruhr-University Bochum. Universitätstr. 150, 44780 Bochum, Germany — 2Technical and Macromolecular Chemistry, Paderborn University, Warburgstr. 100, 33098 Paderborn, Germany

In-vacuum characterisation of magnetron targets after high power pulsed magnetron sputtering (HiPIMS) has been performed using X-ray photoelectron spectroscopy (XPS). Al-Cr composite targets (circular, 50 mm diameter) in two different geometries were investigated: an Al target with a small cylinder of Cr inserted at the racetrack position, and a Cr target with a small disk of Al inserted at the racetrack position. The HiPIMS discharge and the target surface composition were characterised for three different power conditions. The HiPIMS plasma characterisation was done using optical emission spectroscopy (OES) and fast imaging by a CCD camera; the surface characterisation was done after in-vacuum transfer of the magnetron target to the XPS. This parallel evaluation has provided information about: (i) lateral transport and redeposition of sputtered species on the target, (ii) oxidation state of the target surface as function original composition, position and HiPIMS plasma conditions, and (iii) correlation between local surface conditions and plasma characteristics.

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