Bremen 2017 – wissenschaftliches Programm

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SYPO: Symposium Plasma und Optische Technologien

SYPO 4: Plasma und Optische Technologien II

SYPO 4.4: Hauptvortrag

Mittwoch, 15. März 2017, 17:35–18:00, GW1 HS

Low stress transparent materials for optical coatings on flexible substrates — •Melanie Gauch, Henrik Ehlers, and Detlev Ristau — Laser Zentrum Hannover e.V. , Hollerithallee 8, 30419 Hannover, Germany

Ion beam sputtering (IBS) is known as a well suited coating process for the deposition of high quality oxide coatings usually produced on glass substrates. However, thin and flexible carrier substrates like PMMA foils need adapted coating materials with properties beyond the quality of oxide coatings. Especially high coating stress can lead to problems like deformation of the substrates or coating failure due to cracking and delamination. In this study IBS was used for the production of nearly stress free coatings sputtered from a PTFE target and from a zone target consisting of PTFE and alumina or tantalum. The relation between composition and optical properties was investigated just as the coating stress. Single layer coatings on PMMA foils are produced with this materials and a simple multilayer system with reduced stress is demonstrated.