Dresden 2017 – wissenschaftliches Programm
CPP 32.11: Vortrag
Mittwoch, 22. März 2017, 12:15–12:30, CHE 91
Direct Micropatterning of Organic Thin Films by Electron Beam Processing — •Marie Hoffmann, Elisabeth Bodenstein, Björn Meyer, Falk Winckler, Matthias Schober, and Christoph Metzner — Fraunhofer FEP, Winterbergstr. 28, 01277 Dresden
The patterning of organic layers becomes more and more important especially for applications in solar cells and organic electronics. Organic light-emitting diodes (OLEDs) offer numerous advantages compared to commercially used LCD technology for displays and lighting, e.g. no backlight is needed and the feasibility of very thin, flexible displays is given. The improvement of OLED displays regarding efficiency, lifetime and resolution is an ongoing effort. One of the major challenges is the realization of very small structure sizes. Current patterning methods like thermal evaporation through fine metal masks, printing or lift-off techniques have been demonstrated, however, deficiencies regarding the flexibility of new applications are still existing and desired structure sizes could not be achieved jet. Therefore a method for direct patterning by using electron beam technology has been investigated. Penetrating electrons heating a multilayer system locally lead to a structured evaporation of the organic material. In the current work several experiments and investigations of electron beam processing of organic layers were performed. The process window for a careful adjustment of defined material properties could be narrowed through additional simulation calculations. First results will be shown and the technology assessed to its prospective usability.