Dresden 2017 – wissenschaftliches Programm
CPP 52.12: Poster
Mittwoch, 22. März 2017, 18:30–21:00, P3
Electroactive silicone gel layers with tailor made actuation behavior for tunable mirrors — •Markus Franke1, Irma Slowik2, Philipp Mehner1, Ulrich Merkel1, Hartmut Fröb2, Karl Leo2, and Andreas Richter1 — 1Institut für Halbleiter- und Mikrosystemtechnik, Technische Universität Dresden, D-01062 Dresden, Germany — 2Dresden Integrated Center for Applied Physics and Photonic Materials, Technische Universität Dresden, George-Bähr-Strasse 1, D-01069 Dresden, Germany
The research field of electroactive polymers (EAP) enables varied applications in robotics, energy harvesting, sensing or even tunable optics. Here, a utilization of EAP actuators for tuning optical mirrors can be a cost- and process-efficient alternative to current membrane based MEMS. In this study we developed various silicone gel based EAP actuators for tuning highly reflecting mirrors. They consist of a thin and structured silver layer acting as a flexible top electrode, a compressible silicone layer and a fixed ground electrode. This capacitor setup allows a tailor made EAP actuation and mirror deflection in height or angle by varying processing parameters like crosslinking density of the gel, surface activation or lateral dimension of the electrode. These aspects could be clarified by surface analysis as well as electrical and mechanical characterization of the EAP actuator. Furthermore, finite element simulation helps to understand the versatile mirror deflection shapes depending on the mechanical strength or the electrical field distribution of the capacitor. Finally, the EAP actuator with a planar shaped mirror deflection is applied for a tunable optical micro cavity setup.