Dresden 2017 – wissenschaftliches Programm
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DF: Fachverband Dielektrische Festkörper
DF 9: Poster Session
DF 9.12: Poster
Dienstag, 21. März 2017, 14:00–16:00, P1C
Modelling electrode shape deformations of a dielectric elastomer actuator with finite elements — •Philipp J. Mehner, Markus Franke, Andreas Voigt, Uwe Marschner, and Andreas Richter — Chair of Polymeric Microsystems, Technische Universität Dresden, Germany
The concept of dielectric elastomer actuators is used for tuning an optical micro-mirror for low-cost laser development. The basic elements are a flexible top electrode, a transparent dielectric elastomer based on PDMS and a fixed bottom electrode. The employed PDMS has an extremely low elastic modulus, to keep the driving voltage under Umax=100 V. Experimental investigations have shown that the shape of the micro-cavity under stress highly depends on the width of the top electrode and the bonding process increases the stiffness of the layer underneath. Due to the micro scale of the setup and the nanoscale thickness of the electrodes, 3d shape measurements are difficult to perform. Computer aided models, based on finite elements, will help to understand and visualize the shape deformations.
We propose a finite element method implemented in ANSYS which utilizes coupled elements for accurate and time efficient simulation runs. A concept of how to implement a depth dependent elastic stiffness will be presented. The simulated results are in accordance with the conducted experiments. This approach helps to formulate novel design parameters to optimize the developed of dielectric elastomer actuators.