Dresden 2017 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 3: Thin Film Characterisation: Structure Analysis and Composition I
DS 3.5: Vortrag
Montag, 20. März 2017, 10:30–10:45, CHE 91
3D-Analysis of fine-grained metallic thin films. — •Ahu Öncü1, Thomas Hempel1, Bodo Kalkofen2, Thorsten Halle3, and Dana Zöllner1 — 1Institute of Experimental Physics, Otto-von-Guericke-University Magdeburg — 2Institute of Micro and Sensor Systems, Otto-von-Guericke-University Magdeburg — 3Institute of Materials and Joining Technology, Otto-von-Guericke-University Magdeburg
Fine-grained thin films play an important role in many technical applications. It is also known that grain microstructures of polycrystalline metals and alloys have an immense impact on materials properties. That is why it is important to understand the processes of grain growth not just as surface effects, but also as mechanisms in the entire layer like in bulk materials.
Commonly, thin layers are measured in 2D and compared with 2D simulations and analytic theories. However, two-demensional analytic size distributions or topological correlations between grains rarely capture the experimental features. One reason of this disagreement can be found in the simple fact that the experimental samples are of 3D nature. In the present work, we analyze the grain microstructures of thin aluminum films experimentally and compare the results to 3D computer simulations.