Dresden 2017 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 36: Postersession I
DS 36.44: Poster
Mittwoch, 22. März 2017, 17:00–19:00, P2-EG
Protective ceramic layers deposited by chemical vapor deposition on complex 3D tools — Gregor Fornalczyk1, •Sebastian Schipporeit2,3,4, Frank Mumme1, Friederike Deuerler2, and Volker Buck3,4 — 1Gemeinnützige KIMW Forschungs-GmbH, Luedenscheid — 2University of Wuppertal, School of Mechanical Engineering and Safety Engineering, Material Technology, Wuppertal — 3University Duisburg-Essen, Thin Film Technology Group, Faculty of Physics, Duisburg — 4CENIDE, Duisburg
Yttrium-doped ZrO2 coatings are well-known to protect metallic tools and injection molds from wear and corrosion. This material is a highly anti-corrosive and wear resistant ceramic. It is particularly suitable for coating steel substrates, because their thermal expansion coefficient and mechanical properties are similar. We used a mixture of metal acetylacetonates in a 3D conformal aerosol-assisted chemical vapor deposition process. These precursors decompose at low temperatures (<500∘C) and, thus, allow the deposition of layers into narrow cracks and holes without corroding or mechanically harming the steel substrates. We deposited films with excellent adhesion and wear properties at a nearly constant coating rate in aspect ratios up to 1:50 in 0.1 mm thin columns.