Dresden 2017 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 44: Postersession II
DS 44.25: Poster
Donnerstag, 23. März 2017, 17:00–19:00, P1C
Ti2AlN and Ti2AlC MAX-phase synthesis by multilayered PVD coatings — •Frank Burmeister1, Lukas Gröner1, Eberhard Nold1, Eduart Reisacher1, Francesco Colonna2, Alexander Fromm1, Frank Meyer1, and Chris Eberl1 — 1Fraunhofer IWM, Freiburg, Deutschland — 2Freiburger Materialforschungszentrum, Freiburg, Deutschland
Mn+1AXn phases belong to a group of ternary nitrides or carbides, where M denotes an early transition metal, A denotes mostly a group III or IVA element and X is either nitrogen or carbon. Due to the presence of strong covalent MX bonds and weak ionic MA bonds, these materials often exhibit a high corrosion resistance as well as good electrical conductivity and thermal stability. The phase synthesis and their suitability for industrial applications, e.g. as protective and/or conductive coatings has been studied for crystalline films by others. However, these properties are strongly influenced by the material's microstructure and phase composition. To investigate the evolving microstructure of polycrystalline Ti2AlN and Ti2AlC coatings, AlN-Ti and Al-TiC multilayers were deposited by reactive sputtering using either nitrogen or methane as reactive gases, followed by a subsequent annealing step at 700°C in vacuum. In this way, coatings with a dominant M2AX-phase component were synthesized successfully. The coating*s properties were examined by elemental and phase analysis using XPS, XRD and Raman spectroscopy. The investigations revealed a prominent texture in the coating's microstructure which was ascribed to the multilayered deposition.