Dresden 2017 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 48: Oxide Semiconductors (jointly with HL)

DS 48.10: Vortrag

Freitag, 24. März 2017, 12:30–12:45, POT 51

Gas sensing with sub-micrometer Pt/TiO₂ sensors — •Svenja Herbertz, Mihai Cerchez, and Thomas Heinzel — Solid State Physics Laboratory, Heinrich-Heine-Universität Düsseldorf

Pt/nanoporous TiO₂ hydrogen sensors with active sizes in the millimeter regime are technically well established although the underlying physics is still at debate, due to incomplete understanding of the interplay between oxygen vacancies, titanium interstitials, and hydrogen incorporation in this disordered system. The quest for miniaturization as well as for improved spatial resolution drives the search for sensors operational at the microscale. Here we present a sub-micrometer-sized lateral sensor for atmospheric hydrogen with planar geometry and full compatibility with Si processing technology. A titanium dioxide line of 200 nm width, written with the tip of an atomic force microscope, separates a thin Ti film on an insulating substrate into two metallically disconnected electrodes and forms the active area. It is sensitized by a sub-monolayer platinum sputtering step such that the two Ti electrodes remain disconnected. The device shows a large, selective sensitivity to hydrogen gas.