Dresden 2017 – wissenschaftliches Programm
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MM: Fachverband Metall- und Materialphysik
MM 22: Poster session I
MM 22.27: Poster
Montag, 20. März 2017, 19:00–20:00, P4
Nano Structuring with New High-Resolution and Longtime-Stable Liquid Metal Ion (Alloy) Sources — •Torsten Schneider-Rahder1,2, Achim Nadzeyka2, Lars Bruchhaus2, Sven Bauerdick2, Paul Mazarov2, Michael Kahl2, and Andreas-Dirk Wieck1 — 1Lehrstuhl für Angewandte Festkörperphysik, Ruhr-Universität Bochum — 2Raith GmbH, Dortmund
To generate structures on scales of micro- or nanometers, metal ions and clusters can be used, because their de Broglie wavelength is much smaller than that of light. This allows a higher resolution also of structures smaller than the wavelength of light. In fact, the resolution limit is more on the side of the instrumentation than due to the de Broglie wavelength, being of the order of only λ = h/√2mE = 20 fm (mass 70 amu, E = 30 keV). Metal ions emitted by liquid metal ion sources (LMIS) are bundled to a focused ion beam (FIB). Most of the commercial applications use Ga+ ions; here drawbacks exist due to unwanted implantation. Thus the fundamental goal of the current project is to investigate alloys consisting of different other metals, which show a eutectic behavior and are suitable to achieve a longtime-stable operation of the LM(A)IS. First, the sputtering yield of a LMAIS emitting Au+, Au++ and Si++ ions will be analyzed according to the beam current and the dwell time. For these measurements, samples of Si, Cr, Au and others will be used. Subsequently, more parameters will be varied in order to maximize the removal rate and the resolution. Similar investigations will be conducted using other alloys containing different metals (basically Bi) to optimize their operating conditions as well.